Weisheng Li Postdoctor wsli@nju.edu.cn | Mingyi Du Ph.D Student 652022230003@smail.nju.edu.cn |
Facing the demands for logic transistors in the future sub-1 nanometer advanced manufacturing process, we will develop core device processes that conform to the characteristics of two-dimensional materials, such as non-destructive transfer, dielectric integration, ohmic contact, controllable doping, and three-dimensional stacking. We will explore new device architectures such as GAA FET and CFET, achieve PPA (performance power area) collaborative optimization of the comprehensive performance of two-dimensional semiconductors, and fully demonstrate the potential of two-dimensional semiconductors in advanced logic integration applications.