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Facilities
  • Molecular Beam Epitaxy (MBE分子束外延)
  • Magnetron Sputtering (磁控溅射)
  • Laser MBE (激光分子束外延)
  • Atomic Layer Deposition (ALD原子层沉积)
  • Electron Beam Lithography (EBL电子束光刻)
  • Gas Cluster Ion Beam (GCIB气体团簇离子束原子...
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